Saturation of front propagation in a reaction-diffusion process describing plasma damage in porous low-k materials
نویسندگان
چکیده
Soghra Safaverdi, Gerard T. Barkema, 3 Eddy Kunnen, Adam M. Urbanowicz, and Christian Maes 1Instituut voor Theoretische Fysica, K.U.Leuven, Belgium 2Theoretical Physics, Utrecht, The Netherlands 3Instituut-Lorentz for Theoretical Physics, Leiden University, The Netherlands 4imec, Kapeldreef 75, 3001 Heverlee, Belgium 5Semiconductor Physics Section, Department of Physics and Astronomy, K.U.Leuven, Belgium
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